The CMS Series are electrical feedthroughs for passing current and applying voltage to vacuum chambers with pressure ranging from atmospheric pressure to ultra-high vacuum.
Operating pressure range | 10-2 Pa to ultra-high vacuum pressure |
Permitted bake-out temperature | 300ºC max. |
Temperature variation ratio | 25ºC/minute max. |
Permitted leak rate | 1.3 x 10-11 Pa·m3/s max. |
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