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LS Series

Dry Vacuum Pump
LS Series

LS120

High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application

Features

■High pumping speed"
  ●High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
■Low power consumption
  ●ECO-SHOCK technology realizes low power consumption (C Type)
  ●Power consumption at the ultimate pressure is the industry-leading 0.6kW or less(LS120A-C)
■Low noise

  ●Built-in silencer achieves the noise level 61dB(A) or less
■Low running-cost
  ●No shaft sealing gas
※Purge gas is available with L Type.
■4 kinds of model
  ●Pumping speed120~1200m3/h Class ※With mecanical booster pump
  ●Model is selectable with the optimum pumping speed according to the application

Applications

2 types for specific application
 C Type:Clean process (LS***A-C)
   Feature:Low power consumption model (with built-in ECO-SHOCK)
   Applications:For clean process such as air and N2
        Sputtering/Vapor deposition/Lamination/Load lock room/TMP backing pump etc.
 L Type:Light process(LS***A-L)
   Features:Light process model (with surface treatment and purge function)
   Applications:For light process such as steam and volatile liquid medicine
        Vacuum drying/Freeze drying/Ashing/General industrial use etc.

Specifications

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