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DPG Series

DPG-2_web用

The DPG-2/DPG-4 are 2 kW/4 kW DC power generators for sputtering. Repeatability is excellent because of high control accuracy

Features

・High control precision
High precision of ±1% of set value even in a low power region of below 10%.

・Wide accuracy guarantee
Guarantee the wide range power control from 1 to 100%.

 ・Light-weight/space-saving
Light-weight and space-saving design with excellent installation flexibility.

・ Requires no cooling water
 Forced air cooling, requires no cooling water.

High reliability
Our accumulated knowledge as an equipment manufacturer has been reflected in the design.

Applications

・ Sputtering equipment for R&D
・ BIAS power supply of sputtering equipment

Specifications

 

 

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