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June. 29, 2009

"CCMT-D Series Ceramic Capacitance Manometers" was published.

June 23, 2009

ULVAC, Inc. Launches the Muti-Probe Evaluation of Thin-film Characterization System for Tandem Type Thin-film Solar Cell MPEC-1300 Reduces the Initial Cost of Evaluation System Introduction to 1/2

June 23, 2009

ULVAC, Inc. Developed and Launched the New PE-CVD System “CIM-1400” for Microcrystal Silicon Layer Utilized in Tandem Type Thin-film Silicon Photovoltaic Modules Production Turnkey line. Incorporated With this System, Conversion Efficiency is Increased by 30% and Manufacturing Cost per Watt (Wp) is Reduced by 10% Compared with a-Si Photovoltaic modules

June 22, 2009

INITIUM to launch AFFINIX QN µ (Micro) QCM Molecular Interaction Analyzer

Mar. 23, 2009

ULVAC-RIKO Announces RMP-1 Rapid Multi Property Measurement System

Mar. 5, 2009

"Dry Etching Tool APIOS NE-950EX" was published.

Jan. 7, 2009

"Quadurupole mass spectrometer with differential pumping kit Qulee with YTP Qulee with YTP" was published.

Jan. 5, 2009

ULVAC’s Turnkey Production Line of a-Si Thin film
Solar Cell Received a Nihon Keizai Shimbun Awards
for Excellence in the 2008 Nikkei Superior Products
and Services Awards

Dec. 24, 2008

ULVAC-PHI and ULVAC have achieved
the world's first success in low-damage depth
profile analysis of organic molecular materials and
ceramic materials using XPS/ESCA equipped
with a GCIB gun

Dec. 24, 2008

"Leak Detector HELIOT 710 Series" was published.

Dec. 17, 2008

ULVAC, Inc. Announces its Establishment of
World’s First Solar Cell Modules Testing Laboratory
as an Equipment Manufacturer
with the Cooperation of TÜV Rheinland Japan Ltd.

Dec. 17, 2008

"Residual Gas Analysis/Process Gas Monitor High Performance Process Gas Monitor Qulee HGM" was published.

Dec. 1, 2008

ULVAC and ULVAC Materials have Developed the World’s First Integrated Mass Production Technology for Thin-film Lithium Secondary Batteries

Dec. 1, 2008

ULVAC Introduces the High Productivity Resist/Residue Removal
Tool – ENVIROTM-Xceed400

Nov. 27, 2008

ULVAC launches the sale of LED mass-production-dedicated dry etching system NE-950EX
- Productivity up 140% over the current standard -

Oct. 27, 2008

ULVAC and Mitsubishi Materials Corporation jointly developed new TFT wiring technology
–New copper alloy target adopted to the new sputtering technology–

Oct. 8, 2008

"G-TRAN series Atmosphric Pirani Gauge SW1" was published.

Oct. 8, 2008

"G-tran series 1CH Display Unit ISG1" was published.

August 26, 2008

Energies are Savable in Vacuum Conveyance,
Replacing Air Ejectors and Rotary Vane Vacuum Pumps:
ULVAC markets a Large-displacement Rocking Piston Dry-Vacuum Pump in August 2008

July 16, 2008

Thin Film Vacuum Distillation now available for Electronic Materials
–Announcing new type of centrifugal vacuum distillation system –

June 30, 2008

ULVAC Ranked Fifth in VLSI Research's 10 BEST Awards for Large Suppliers of Wafer Processing Equipment

May 21, 2008

World's First Simultaneous Measurement of In-plane Distribution of Seebeck Coefficient and Thermal Conductivity
- Development and commercialization of the STPM-1000 -

May 21, 2008

Introducing a Sputtering System for Non-conductive metal coating
– Launch of a new sputtering system for functional decorative coating –

May 13, 2008

Impact of the earthquake in Sichuan Province, China

Apr. 22, 2008

"Batch type Vacuum Heat Treatment Furnace FHB-60C" was published.

Mar. 31, 2008

Developed and Commercialized of "Magrise": a Mass-Production System for the World’s Highest Grade Rare-Earth Permanent Magnets
–Launched the first system ever to improve magnet performance while saving Dy–

Mar. 27, 2008

Newly Developed Carbon Nanotube Film Formation System for 300-mm Wafers

Feb. 15, 2008

"Dektak 150 Stylus Surface Profiler" was published.

Feb. 7, 2008

ULVAC Developed the Cu Wiring Process for TFT
-Adhesion and Barrier Performance Improved by Oxygen-mixture Sputtering-

Jan. 28, 2008

Shinoda Plasma Establishing the Alliance System for PTA Commercialization, with Investment from ULVAC, Fujimori Kogyo, and Dyden

Jan. 16, 2008

Release of New Models of Inline Sputtering Systems Supporting 8.5th to 10th Generation CF Substrates Achieving High Throughput and Process Stability

Dec. 13, 2007

ULVAC KOREA, Ltd. received the Best Foreign Corporation Award.

Nov. 29, 2007

ULVAC Launched the sale of NE-950, the dry etching system dedicated for LED/LD mass-production targets five times productivity

Oct. 26, 2007

China Solar Power Enters Thin Film Solar Cell Market in China by Forging Strategic Alliance with ULVAC, Inc. of Japan

Oct. 5, 2007

Operation starts in the new Sigma-Technos Co., Ltd. Plant Headquarters also moves to the new office building

Oct. 3, 2007

Mie Sales Office was relocated.

Sep. 12, 2007

ULVAC receives awards from the Japan Vacuum Industry Association

Aug. 21, 2007

ULVAC has developed a new process technology for manufacturing magnetic heads for next-generation HDDs

Aug. 2, 2007

Sunner Solar Corporation is going to enter the solar energy market. ULVAC made a package contract for the production systems.

June 29, 2007

ULVAC has developed a new film formation technology for high-density PCRAM. GST film hole-filling sputtering has been realized

Apr. 11, 2007

The "Sputtering system SDP-s series for the G8 or later liquid crystal CF/PDP" won the grand prize for the ADY2007 Display Manufacturing Equipment Category.

Mar. 28, 2007

"Research and Development System for ReRAM" was published.

Mar. 23, 2007

NexPower Technology Corporation is going to enter the solar energy market. ULVAC made a package contract for the production systems.

Feb.22, 2007

"Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monitor Qulee BGM-200" was published.

Jan. 30, 2007

Information on the product"JSPUTTER JSP-8000" was published.

Oct. 25, 2006

JDSU Forms Alliance with ULVAC to Extend Deployment of Leading Edge Optical Coating Platform to Meet Demands of Industrial Market in Asia

Oct.17, 2006

Information on the product"Helium Leak Tester (COMPACT-ALT) CLT" was published.

Sep. 28, 2006

Marketing of long-life radio-frequency (RF) ion guns commenced

Sep. 28, 2006

Linear ion guns with improved initial discharge current characteristics launched

Sep. 19, 2006

We would like to announce that ULVAC, Inc., has developed a new technology for manufacturing MEMS PZT piezoelectric devices.

Sep.14, 2006

Information on the product "COMPACT SPUTTER ACS-4000-C3" was published.

Sep. 11, 2006

Launched the Qulee (pronounced as "KLEE") Series, residual gas analysis/process gas monitor achieving ultra low-cost and pursuing facilitation and convenience.

Sep.11, 2006

Information on the product"Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monitor Qulee BGM", "Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM"was published.

Sep. 6, 2006

Launched the sale of new-model sputtering equipment for automotive parts. Achieved high productivity by three-layer continuous processing, as well as space saving and environmental compliance.

July 28, 2006

Launching the Low-k Inter-layer Dielectric Film Materials and Wafers with Low-k Films for Next-generation LSI

July 27, 2006

Establishment of a New Company for Sales and Customer Support in Malaysia

June 22, 2006

New Chromatogram Processor Designed for RoHS Compliance, Compactness, and High Performance

June 22, 2006

Latest Type Double-Arm Vacuum Transfer Robot ULSTA-300: It is your Key for Throughput Improvement

Mar. 23, 2006

Relocation of the Institute of the Company, Establishment of a New Office of Its Consolidated Subsidiary and Construction of an Extension to the Tohoku Office of the Subsidiary

Mar. 23, 2006

Construction of the Aichi Plant

Apr.4, 2006

Information on the product "Small Vacuum Transfer Module NCH-mono ", "Vacuum Transfer Module NCP-6000 " was published.

Feb. 16, 2006

Establishment of a New Company for Manufacturing of Control Panels in Taiwan

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