TECHNICAL JOURNAL 79E July/2015
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TECHNICAL JOURNAL 79E July/2015

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1

Deposition Technique of IGZO Film for Large Sputtering Cathode

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2

Recent Development in Ion Implantation System for Crystalline Sillicon Solar Cells

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3

Development of the“ CEE-950” Thin Film Encapsulation Equipment for OLEDs

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4

Development of Leak Detector“ HELIOT 900 Series”

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5

Oil-sealed rotary vacuum pumps using magnetic couplings

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6

Joint Development of Cryogen Free Dilution Refrigerator using 4K-Cryocooler

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