No.79E July/2015

1. Deposition Technique of IGZO Film for Large Sputtering Cathode

Author Yasuo OOKUBO, et al., Institute for Super Materials
Abstract We developed new cathode “Moving Cathode” in order to accomplish high uniformity and high bias stability sputtering onto a large scale substrate. As a result of sputtering amorphous Indium-gallium-zinc oxide (a-IGZO) using this cathode, there indicated the film thickness distribution of ±2.9% on Generation6 substrate (1850 mm×1500 mm) and mobility: 7.5 cm2/V/sec, Sub-threshold swing: 0.32 V/dec, Von=1.1±0.25 V at TFT characteristics. Also in bias stability both positive bias temperature stress and negative bias illumination temperature stress, it demonstrated high uniformity and high bias stability.

2. Recent Development in Ion Implantation System for Crystalline Sillicon Solar Cells

Author Miwa TANAKA et al., Advanced Electronics Equipment Division
Abstract We have developed the PVI-3000N, an ion implantation system for crystalline solar cells. The system features pattern implantation using masks. This system can be used to pattern high-efficiency solar cells such as PERC and IBC cells. The accuracy of the position is within ±50 μm. In addition, the resistance is uniform on wafer surfaces to within ±4% and is stable between batches. The units have been introduced in factories that mass produce solar batteries as equipment for producing high-efficiency solar cells.

3. Development of the“ CEE-950” Thin Film Encapsulation Equipment for OLEDs

Author Yuuko KATO, et al., FPD・PV Division
Abstract To produce flexible next generation displays, it is essential to apply thin films that have excellent encapsulation properties against moisture. We have already developed SiNx film as an encapsulation film, and with it we achieved a WVTR value of 5E-5g/m2/day using the Ca method. Now we have developed a technology with excellent particle coverage by layering SiNx film and acrylic using laminated film deposition.

4. Development of Leak Detector “ HELIOT 900 Series”

Author Michito HIRAYAMA et al., Components Divison
Abstract Helium leak detectors on the market, has been spread from the vacuum, automobiles and frozen and nuclear industry to food and medical supplies packing industry. Therefore the test work and use is becoming a wide variety. In such market circumstances, we have developed a "HELIOT900 series" with the aim to improve the basic performance of measuring the fine leak and usability.

5. Oil-sealed rotary vacuum pumps using magnetic couplings

Author Naoto YOTSUGI et al., Research & Devolopment Division, ULVAC KIKO, Inc.
Abstract Oil-sealed rotary vacuum pumps have been used to produce vacuums in various sectors. They have two major problems that arise from their mechanisms.
The inside of oil-sealed rotary vacuum pumps is filled with oil. Oil seals are used to prevent oil from leaking out of the rotary shafts of the power transmissions. However, the oil seals wear away if the pumps are operated for extended periods of time, which makes oil more likely to leak. This problem was solved by installing “non-contact” magnetic couplings into the sealing sections.
Another problem is that when pumps are not operating and vacuums are maintained for an extended period of time, the oil is pushed from the air release side by atmospheric pressure and flows backward, which causes the oil to get in the chambers connected to the pumps. Our solution to this problem was to install oil check valves immediately below the inlets. The check valves work with the air intake valves that return the pressure of the inside of the pumps to atmospheric pressure.

6. Joint Development of Cryogen Free Dilution Refrigerator using 4K-Cryocooler

Author Tomio NISHITANI, Cryogenic Equipment Division, Ulvac Cryogenics Inc.
Tohru HATA, Professor Emeritus, Graduate School of Science, Osaka City University.
Abstract Cryogenic Equipment Division of Iwatani Industrial Gases Corporation (IIG), which produces and selles cryogenic refrigerators and their application products, was transferred to Ulvac Cryogenics Incorporated on May 1, 2014. Cryogenic Equipment Division of IIG and Osaka City University jointly developed cryogen- free dilution refrigerator from 2006 to 20131)–5). From 2014, Ulvac Cryogenics Incorporated has succeeded this effort and has been developing a new dilution refrigerator with Osaka City University This paper reports the history and progress of these development efforts.