Technical Journal

The Technical Journal is ULVAC Group’s technical information magazine. The latest issue can be downloaded from this site. Input designated items into the user registration form, and click on “submit.” Your login ID and password to enter the download site will be sent to you by return.

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TECHNICAL JOURNAL 82E January/2019

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1 Development of a Dry Etcher-Equipped Wet Rinse Unit for Metal Process
2 Development of a Cu Alloy Sputtering Target
3 Research on In-plane Thermoelectric Elements Using the Spin Seebeck Effect
4 Development of Niobium Nitride Thin Film for Next-Generation Superconducting Acceleration Cavities
5 “LS Series” Dry Vacuum Pumps with High Pumping Speed and Low Power Consumption

CONTENTS OF BACK NUMBERS OF TECHNICAL JOURNAL icon_pdf