Research and Development Institutes

（ULVAC Head Office/Plant in Chigasaki, Kanagawa）

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• It was reborn as the " Institute of Advanced Technology " in April 2020. Aiming at the realization of innovative next-generation manufacturing technology aiming for high functionality, high reliability, and high productivity of various equipment through future mechatronics technology, simulation technology, and analysis technology, including equipment, film formation technology, and material development is in progress.

（In Susono, Shizuoka）

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• In Susono, in addition to DRAM and 3D NAND for semiconductor devices, we develop manufacturing equipment and processes for cutting-edge logic and non-volatile memory processes. We also develop manufacturing equipment and processes for electronic components such as communication devices.

（In Tomisato, Chiba）

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• Tomisato develops thin-film deposition processes for a wide range of fields including FPDs, electronic parts, and various films, as well as oxide semiconductors and metal materials for wiring.

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• The Future Technology Research Laboratory was established in July 2015 to develop long-term growth seeds, pursuing provision of the materials and technologies that can innovate on next-generation devices and the revolutionary technologies that can solve the global environmental and energy issues.

  Since 2018,Through Osaka University's industry-academia collaboration framework, the Joint Research Lab aims to promote mutual exchange among researchers and build an R&D network, contribute to scientific advancement and the resolution of technical issues in the medical engineering field, and develop highly creative university human resources.

  Research Laboratory for Future Technology

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• By combining the Tokyo Tech's plasma diagnostics technology and AI technology, the Collaborative Research Cluster aims to improve the performance of plasma processing equipment by measuring plasma conditions that could not be measured before. The synergy created by laboratories from different fields working together is expected to produce new research results that cannot be obtained through individual collaborative research. 

  Additionally, leveraging this organization-to-organization collaboration will lead to a wide range of positive outcomes, not only in joint research but also in fields such as personnel development, leading to the advancement of future growth for both ULVAC and Tokyo Tech.