VEP Series models are systems for deposition of various organic and inorganic materials by methods including evaporation, sputtering, plasma metallization and evaporation metallization. Process chambers can be freely selected to match the application.
Series name | VEP-1000 Series |
Chamber material | Stainless steel |
Chamber size | 350 x 650 mm (diameter x height) |
Substrate size | 2-inch diameter or 2 inches square |
Evacuation system | Oil diffusion pump or turbomolecular pump |
Final pressure | 10-4Pa max. |
Substrate heating | Maximum temperature : 250ºC |
Substrate transfer | Pneumatic horizontal transfer system |
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