Organic Material Evaporation System for R&D Mini-Lab|Vacuum Evaporation System|Products|ULVAC, Inc.
Vacuum Evaporation System

Organic Material
Evaporation System for R&DMini-Lab

This is a load-lock type material evaporation system for R&D use which deposits organic films, alkali metal films and metal films.


  • Load-lock type vacuum evaporation system consisting of transfer chamber and deposition chamber.
  • Enabling the deposition of organic, alkali metal and metal films.
  • Deposition methods using either rotation, index or mask sliding mechanism are available.
  • Deposition with mask and mask exchange mechanism are available. Process needed for organic material evaporation can be done in one batch.


  • Organic material system for R&D use

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