Multi-chamber type Evaporation System EME-400|Vacuum Evaporation System|Products|ULVAC, Inc.
Vacuum Evaporation System

Multi-chamber type Evaporation SystemEME-400

EME-400 is the Multi-Chamber type Load Lock system with hexagonal shape core chamber. Transfer chamber is located in the center that is connected with each deposition chamber separated, and substrate is transferred by robot. The simultaneous deposition for mass production is available free of contamination.


  • Deposition chamber and heating chamber are available.
  • Various substrate sizes; maximum is 300mm x 400mm.
  • Easy connection with transfer robot by using face-up transfer of the substrate.
  • Good film thickness uniformity by rotation system.
  • Substrate heating ; maximum is 350ºC.
  • Trans-hearth EB gun is available.
  • Feeder system by rod or wire feeding.


  • FED

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