Sputtering System
In-line type
Single-substrate
In-line type
Single-substrate
Sputtering SystemsSMD Series
The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and ITO films. ULVAC has delivered a large number of these systems, for use in a wide range of production environments. ULVAC responds rapidly to feedback from production sites to improve the reliability of these models.
Features
- Substrate-only transfer and side deposition method enable low particle generation.
- Space-saving design
- Individual substrates can easily be managed using parameters such as deposition conditions.
- Different cathodes are available for deposition of different substances.
- Wide range of deposition processes are supported, based on ULVAC's abundant experience and data.
Applications
- Thin-film transistors (TFTs)
Specifications
| Type | G4.5 | G5 | G5.5 | ||
| SMD-950 | SMD-950X3 | SMD-1200CX | SMD-1500X | ||
| Cluster-type | X-type | ||||
| Substrate size (mm) | 730 X 920 | 1200 X 1300 | 1300 X 1500 | ||
| Chamber configuration | 1) Loading/unloading chambers | 2 | |||
| 2) Heating chambers | 1 | - | |||
| 3) Transfer chambers | 1 | ||||
| 4) Sputter chambers | 4 | 2 (Up to 2 cathodes) | 2 (Up to 3 cathodes) | 2 (Up to 2 cathodes) | |
| High vacuum evacuation system | Cryopump | ||||
| Substrate transfer system | 1-level arm | 2-level arm | 2-level arm | ||