Sputtering System
In-line type
Holizontal In-line Type
In-line type
Holizontal In-line Type
Sputtering SystemSCH Series
The SCH Series are horizontal in-line sputtering systems for deposition of transparent conductive films and other metal films. They can be used to depositi films such as back conatct and barrier layers in solar cell production lines.
Features
- Demonstrated high reliability in many mass-production lines
- Flexibility in size and number of substrates
- High deposition rate & high efｆiciency cathode
- Applicable to a broad range of deposition methode (Depo-down/Depo-up, DC/AC/RF sputtering)
- Simple and easy maintenance
Applications
- Transparent conductive, back contact, precursor, buffer layer for solar cells