Sputtering System
Sputtering Coating Machine
Sputtering Coating Machine
(Roll Coater Type) SPW Series
SPW Series is a equipment that can be sputtered optical thin film and metal etc multilayer film on plastic film.
Gas separation chanber for batch processing of high-function multilayer films.
Features
【SPW-030】
- Various modules for different processes and production volumes.
- Can be applied to various applications by selecting and adding modules.
- Can be operated at floor level.
- Excellent gas separation performance and improved sputtering process enable rapid deposition of high grade films.
【SPW-165】
- Various modules for different processes and production volumes.
- Can be applied to various applications by selecting and adding modules.
- Can be operated at floor level.
- Excellent gas separation performance and improved sputtering process enable rapid deposition of high grade films.
Applications
- FPD reflection-reducing films/transparent electrode films/shield films/high barrier films
- FPC electrode films
- Magnetic films/protective films for magnetic recording media
Specifications
| SPW-030 | SPW-060 | SPW-165 C1 | SPW-165 C2 | |
| Target Material | ITO, Nb2O5, SiO2, Cu and Metal | |||
| Web Width | Max300mm | Max750mm | Max1600mm | |
| Web Thickness（μm） | 25 to 200 | |||
| Web Material | PET, PI, PC, COP and Others | |||
| W/UW Max Diameter | φ300mm | φ400mm /φ700mm | φ900mm | |
| Winding Speed（m/min） | 0.5 to 5.0 | 0.1 to 10 | 0.5 to 10 | |
| Cathode Structure | External | External / Internal | Internal | |
| Number of Cathode | 4sets | 8sets | 16sets | |
| 4Pair | 8Pair | |||
| Power Supply | DC or AC | |||
| Numbar of Main Roller | 1set | 2sets | ||
| MR Temp | -5 to 180ºC | -20 to 80ºC | -20 to 100ºC | |
| -10 to 180ºC | ||||
| Option | Bombard system, Ion Gun and Others | |||