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TCO Laser Scribing SystemULT-1400
This system is a single-substrate laser scribing system that is used to remove the transparent electrode (TCO) films formed on the glass substrate by the laser ablation method using the near-infrared wavelength pulse oscillating laser.
This system consists of 6 IR lasers, 6 sets of laser light collection optical system, bridge type XY stage (X-axis: lower axis, Y-axis: upper axis on bridge), substrate conveyor mechanism, dust collector, laser power measuring instrument and control systems. It is achieved high accuracy and high stability for using fiber lasers and a stage made of granite.
Features
- Diode coupled 6 IR lasers:
Laser light is delivered by optical fiber and set variable pulse width - Simple and high stability optical system
- Granite XY stage:
High precision and minimal thermal expansion/contraction - Individual laser positioning control:
Every IR laser has its own Y- and Z-stage - Automatic measurement and calibration of laser output power
- Tact time < 90 sec(ULVAC standard pattern)
Applications
- Thin film solar Cell (TCO Laser scribing)
Specifications
| Substrate material | W1400 x D1100 x t=3-5mm |
| Tact time | < 90 sec. (ULVAC standard pattern) |
| Excitation | Laser Diode |
| Laser wavelength | About 1.06μm |
| Beam delivery | Optical Fiber |
| Beam shape | About 50-70μm circle |
| Number of beams | Air cooling |
| Cooling | Air cooling |
| Stage size | W2420mm x L4570mm x H2100mm |
| Valid stroke | X axis(upper axis): 2000mm Y axis(lower axis): 1260mm Z axis(mounted on Y stage): 50mm |
| Maximum speed | X:1000mm/sec Y:600mm/sec. |
| X-Y orthogonality | Below 5μm/500mm |
| Accuracy of repeatability positioning | Below +/-10μm |