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Batch Type Dry Etching SystemULDEX-1600
ULDEX-1600 features surface texturing formation on silicon wafers for solar cell, with introduced etching gas and high-frequency power. Low-reflecting surface texturing formation leads to improvement of solar cell light absorption performance and cell efficiency.
Features
- High throughput: 4000pcs./hr
- Simple mechanism: No driving system inside the process chamber.
- Simple maintenance.
Applications
- Mono-Crystalline Wafer
- Multi-Crystalline Wafer
- Monolike-Crystalline Wafer
Specifications
| ULDEX-1600 | ||
| Wafer size (mm) | □156 | |
| Wafer per tray (□156mm) | 100pcs. | |
| Chamber configuration | 1) Process chamber | 2 |
| 2) Wafer transfer unit | Option | |
| Throughput(pcs./hr) | 4000 (standard ULVAC conditions) | |