ULVAC to Launch RFS-1305N and RFS-1310N RF Power Generator
- RF power generator based on system expertise -

October 15, 2012 ULVAC, Inc.

ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa; President and CEO: Hisaharu Obinata; hereafter referred to as ULVAC) is pleased to announce that the company will launch the RFS-1305N and RFS-1310N 13.56-MHz RF power generator as well as the MBX-1305N and MBX-1310N automatic matching boxes for spattering and CVD systems starting in January 2013.

[Background]

To respond to recent customer demands for lower costs, higher performance, and greater energy savings, we at ULVAC have made the most of our system expertise as an all-around vacuum manufacturer to develop and commercialize RF power generator for deposition that enable high-speed auto matching operation.

[Overview]

RF power generator for deposition are used, for example, for sputtering systems for manufacturing semiconductor electronic components and for the ion source in CVD or vacuum deposition systems. ULVAC will launch the RFS-1305N forced air-cooled 13.56-MHz/500-W RF power generator, the RFS-1310N 1-kW RF power generator, and the MBX-1305N and MBX-1310N automatic matching boxes with high-speed auto matching performance.
These new products have the following features:

1. A high-performance control algorithm realizes high-speed auto matching operation

2. A high-efficiency circuit with excellent power conversion efficiency is used to realize both compactness and energy saving.

3. We applied the expertise that we have accumulated as a system manufacturer to design the circuit, ensuring high reliability.

[Photo]

RFS-1310N RF power generator
RFS-1310N

[Sales and future development]

ULVAC will launch the RFS-1305N and RFS-1310N RF power generator as well as the MBX-1310N and MBX-1310N matching boxes starting in January 2013. Our target customers are domestic and overseas vacuum device manufacturers; our offices in Japan as well as those of our overseas subsidiaries stand ready to comprehensively support our customers. Our sales goal is a total of 300 units during the first fiscal year. The planned sales prices are 1.8 million yen for a set including the RFS-1305N and MBX-1305N and 2.1 million yen for a set including the RFS-1310N and MBX-1310N.

For further information

ULVAC, Inc. Components Division  compo_info