144 「Rough and Middle Vacuum Pump」 Manual/Spec sheet was found.
![](https://www.ulvac.co.jp/download/wp-content/uploads/DTC-4141K_27300-2-01-11_EN-pdf-212x300.jpg)
Instruction manual_DTC-41.41K
1.35 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DTC-60_26600-2-01-10_EN-pdf-212x300.jpg)
Instruction manual_DTC-60
1.43 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DTC-22ABC_2001900-2-01-6_EN-pdf-212x300.jpg)
Instruction manual_DTC-22A,B.C
1.74 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DTC-4141K_CDEF_27385-2-01-4_EN-pdf-212x300.jpg)
Instruction manual_DTC-41,41K,C,D,E,F
1.76 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DTU-20_E-pdf-212x300.jpg)
Instruction manual_DTU-20
0.54 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DTU-20A_20B_20C_20D_20E_E-pdf-212x300.jpg)
Instruction manual_DTU-20A,B,C,D,E
1.01 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DAU-20_20001-2-04-7_EN-pdf-212x300.jpg)
Instruction manual_DAU-20
0.71 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DAU-100_21001-2-01-8_EN-pdf-212x300.jpg)
Instruction manual_DAU-100
0.96 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DAU-20ABCDE_20001-2-03-5_EN-pdf-212x300.jpg)
Instruction manual_DAU-20A,B,C,D,E
1.52 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DAL-181D361S_27700-2-01-8_EN-pdf-212x300.jpg)
Instruction manual_DAL-181D.361S
1.57 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DA-15D.30S_20400-2-01-7_EN-pdf-212x300.jpg)
Instruction manual_DA-15D.30S
1.29 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DA-20D40S_20106-2-01-14_EN-pdf-212x300.jpg)
Instruction manual_DA-20D.40S
1.27 MB [pdf]