We offer a huge variety of pump maintenance services.

・Vacuum Pump Maintenance

・Other Service, User's Training Program, Pump Recycling.

Service is different depending on the kind of the pump, and inquire in detail, please.

• Initial Service

  • Factory Outsourcing(FOS)

  • MEMS Foundry Service

• Maintenance Service

  • Field Services

  • Pump Maintenance Service

  • Surface Treatment

  • Sputtering Targets/Evaporating materials

  • Recycling/UF Cleaning/Reusing Resources

  • Parts Supply

  • Analysis Services

• Improvements Service

  • Global CIP

• After Service

  • Used Equipment/ Refurbish