Prompt deliveries of high quality ULVAC equipment parts.

High melting point metal	Low expansion ceramic ; VCAT processed alumina titanate	Backing plate for SMD series	Large-sized titanium mask (separate type)	Large-sized aluminum mask for SMD series

A Global Supply

We deliver parts promptly to users all over the world.

[Advanced Technology]

The processing of particular material such as metals with high melting points.
The processing by ultra precision instruments such as large-size chambers.

[Custom Orders]

We supply custom-made parts.

[Quick Delivery]

A huge supply.

• Initial Service

  • Factory Outsourcing(FOS)

  • MEMS Foundry Service

• Maintenance Service

  • Field Services

  • Pump Maintenance Service

  • Surface Treatment

  • Sputtering Targets/Evaporating materials

  • Recycling/UF Cleaning/Reusing Resources

  • Parts Supply

  • Analysis Services

• Improvements Service

  • Global CIP

• After Service

  • Used Equipment/ Refurbish