Sputtering Targets/ Bonding

Sputtering Targets for Large-sized Liquid Crystal Displays (LCD)

・Large enough to match any mother sheet size of glass for FPD
・ITO targets (transparent dielectric material, with low particle and ultra-high density has been developed and provides high productivity)
・Super fine crystal splash free large-size aluminum target
・Mo, W , AlCe large-size targets

Sputtering Targets for Cu Wiring

・High purity Cu targets (6N)
・Ta targets with purity level of 4N5 is realized through melt purification in high vacuum condition
・Homogeneous target materials suitable for LTS (Long Throw Sputtering) are provided through the use of superior machining technology
・Low particle sputtering targets available for minute wiring

Sputtering Target（More Information）

Evaporating materials

A huge variety of materials to meet various demands.

・High-purity metals, alloys and compounds
・Low outgas due to vacuum melting

• Initial Service

  • Factory Outsourcing(FOS)

  • MEMS Foundry Service

• Maintenance Service

  • Field Services

  • Pump Maintenance Service

  • Surface Treatment

  • Sputtering Targets/Evaporating materials

  • Recycling/UF Cleaning/Reusing Resources

  • Parts Supply

  • Analysis Services

• Improvements Service

  • Global CIP

• After Service

  • Used Equipment/ Refurbish