Local stations to provide prompt services and to communicate with users directly.

・On-Call Technical Services

ULVAC offers on-site technical services on an on-call basis to meet individual customer’s needs.

・On-Site Service Engineers

Technicians are on duty to inspect whether the product line is properly functioning, and to replace parts such as inner jigs and evaporation sources.

・A Wealth of Experience and Expertise

Our service ranges from preventive maintenance, overhauls, repairs, remodeling, relocation, disposal to overall maintenance.
*Please contact us for non ULVAC equipment as well.

• Initial Service

  • Factory Outsourcing(FOS)

  • MEMS Foundry Service

• Maintenance Service

  • Field Services

  • Pump Maintenance Service

  • Surface Treatment

  • Sputtering Targets/Evaporating materials

  • Recycling/UF Cleaning/Reusing Resources

  • Parts Supply

  • Analysis Services

• Improvements Service

  • Global CIP

• After Service

  • Used Equipment/ Refurbish