Vacuum Transfer Module
NCP-6000


NCP-6000 is a Hexagon type vacuum transfer module and can make the equipment a compact layout.
NCP-6000 is a basic model for multipurpose correspondances when additional process modules increase.
It is possible to select the either vacuum robot (KEYTRAN-9Z or COVOT).

特徴Page TOP

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NCP-6000 is a small footprint with flexible system.

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NCP-6000 can be used in High vacuum atmosphere. Because the surface of NCP-6000 is treated with Alpika, it can reduce exhaust time.

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NCP-6000 has a single wafer LL chamber which can connects to EFEM.

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Options include: Vacuum components and so on.
ApplicationsPage TOP

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Transfer module and load lock chamber for semiconductor production

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Transfer module for various experimental systems with less than 300mm substrates
SpecificationsPage TOP
 StandardOption
Substrate sizefor 200mm or 300mm wafer-
Facets4(semi standard:W336 x H50)-
Vacuum RobotCOVOTTMKEYTRAN-9Z
Contact

Please Contact :　control info
TEL :+81-467-89-2244 / FAX : +81-467-83-4302
Control Solution Division