ULVAC, Inc. For Industrial Applications Of Vacuum Technology:CCD/CMOS Image Sensors

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Home Product Information CCD/CMOS Image Sensors（by Applications）

■ CCD/CMOS Image Sensors

Multi-chamber Metallization System ENTRON^TM-EX W300
Dry Etching System for Opto-Devices, MEMS NLD-5700
CE-300I High-Density Plasma Etching System for R&D
Si Deep Etching System NLD-500Si, NLD-6000Si
High Density Plasma Dry Etcher ULHITE^TM NE-7800H
Ashing System Luminous NA-1000/1300
High-Temp Ion Implanter for SiC IH-860DSIC
Medium current Ion Implantor SOPHI-200
NEW! Dry Etching Tool APIOS NE-950EX
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Multi-chamber Sputtering System MLX^TM-3000N
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Cluster type Sputtrering System SME-200E
Cluster-type PE-CVD System CME-200E/400

[Components]
NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
REPROS Process Monitors for Reaction Gas
NEW! Leak Detector HELIOT ZERO
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
Vacuum Cluster Tool Integration Platform NCH-4000
Vacuum Transfer Module NCP-6000

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