ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Logic

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Multi-chamber Metallization System ENTRON^TM-EX W300
High-Temp Ion Implanter for SiC IH-860DSIC
Medium current Ion Implantor SOPHI-200
Multi-chamber Sputtering System MLX^TM-3000N
A Batch System to Remove Native Oxide RISE^TM-300
Low-k Interlayer Dielectric Film Materials with Enhanced Plasma Damage Resistance ULKS Ver.3
CN-CVD-400 Carbon Nanotube Growth Experimenting System

[Components]
NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Leak Detector HELIOT ZERO
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
Vacuum Cluster Tool Integration Platform NCH-4000
Vacuum Transfer Module NCP-6000

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