ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Test and Analysis

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■ Test and Analysis

Multi-chamber Sputtering System Magest^TM S200
Multi-chamber Sputtering System MLX^TM-3000N
NEW! Compact Etcher for Reserch & Development CE-L
Low-k Interlayer Dielectric Film Materials with Enhanced Plasma Damage Resistance ULKS Ver.3

[Components]
TDS-2001 Outgas Measuring Instrument
Helium Leak Tester (COMPACT-ALT) CLT Series
PST-030CU/AU Acter Pumps
PST-050CU/AU Acter Pumps
PST-100CX/100AX Acter Pumps
PST-200CX2/200AX2 Acter Pumps
PST-400CX2/400AX2 Acter Pumps
GST-07L Ion Pump Control
PVD Series Oil Rotary Vacuum Pumps (155 to 372 l/min)
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
TM/TMX Series Oil Mist Traps
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
Software for Gas Analysis Qulee QCS
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Helium Leak Tester (COMPACT-ALT) CLT Series
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
MESEC Non-Contact Metal Film Thickness Measurement System
NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000

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