ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Secondary Batteries

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Home Product Information Secondary Batteries（by Applications）

■ Secondary Batteries

Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
Cluster type Sputtrering System SME-200E
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
COMPACT SPUTTER ACS-4000
NEW! Compact Sputter for Research & Development CS-L
NEW! Compact Etcher for Reserch & Development CE-L
CN-CVD-400 Carbon Nanotube Growth Experimenting System
GCIB-25 Gas Cluster Ion Source
Drying Furnace AMF-1000 ACF-500 ASF-500
FMI Series Vacuum Induction Melting Furnaces
Batch type Vacuum Heat Treatment Furnace FHB-60C

[Components]
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
G-Tran Series
G-Tran Series Pirani Gauge Measuring Units
G-Tran Series Hot Cathode Gauge Box Unit
G-Tran Series Cold Cathode Gauge Measuring Units
G-Tran Series 4-Channel Display Units
Pirani Vacuum Gauge GP-G Series
GP-1000G Digital Pirani Vacuum Gauge
GI-D7/GI-N8 Digital Ionization Vacuum Gauges
GI-M2/GI-D7 Ionization Vacuum Gauge
AxTRAN Extremely High Vacuum Gauge
GI-PA/GI-PARY Analog Penning Vacuum Gauges
ISG1/GM-2000 Ceramic Capacitance Manometer Controllers
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000
NEW! Equipment diagnostic system FABISEQ

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