ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Photovoltaics

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Home Product Information Photovoltaics（by Applications）

■ Photovoltaics

SMD-X Series Sputtering Systems
Single-substrate sputtering systems SMD Series
In-line sputter systems New SDP-s Series
Single-substrate plasma CVD systems CMD Series
Inkjet Printing System S-200
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
Cluster type Sputtrering System SME-200E
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
Organic Material Evaporation System for R&D Mini-Lab
MBC-1000/2000 Molecular Beam Epitaxy Systems
COMPACT SPUTTER ACS-4000

[Components]
ER Series Energy-Saving Dry Pumps
Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
REPROS Process Monitors for Reaction Gas
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
NEW! Equipment diagnostic system FABISEQ

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