ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Metals, Machinery Industries

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Home Product Information Metals, Machinery Industries（by Applications）

■ Metals, Machinery Industries

Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
Cluster type Sputtrering System SME-200E
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
NEW! Batch-type Sputtering System SX-200/400
COMPACT SPUTTER ACS-4000
NEW! Compact Sputter for Research & Development CS-L
Drying Furnace AMF-1000 ACF-500 ASF-500
Helium Leak Tester (COMPACT-ALT) CLT Series
FSC Series Vacuum Sintering Furnaces
FMI Series Vacuum Induction Melting Furnaces
FB Series Vacuum Brazing Furnaces
Batch type Vacuum Heat Treatment Furnace FHB-60C
Horizontal type vacuum heat treatment furnace FHH series
Vertical type vacuum heat treatment furnace FHV series
Hot roller type vacuum heat treatment furnace FHHｎ series

[Components]
PVD Series Oil Rotary Vacuum Pumps (155 to 372 l/min)
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
YM-VD, YM-VS Series Evacuation Systems (1,580 to 20,000 l/min)
TM/TMX Series Oil Mist Traps
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000
NEW! Equipment diagnostic system FABISEQ

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