ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Automobile

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Ashing System Luminous NA-1000/1300
High-Temp Ion Implanter for SiC IH-860DSIC
Multi-chamber Sputtering System MLX^TM-3000N
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Cluster type Sputtrering System SME-200E
Backside Metalization Sputtering System SRH-420
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
NEW! Batch-type Sputtering System SX-200/400
COMPACT SPUTTER ACS-4000
NEW! Compact Sputter for Research & Development CS-L
MBC-1000/2000 Molecular Beam Epitaxy Systems
Helium Leak Tester (COMPACT-ALT) CLT Series
FSC Series Vacuum Sintering Furnaces
FMI Series Vacuum Induction Melting Furnaces
FB Series Vacuum Brazing Furnaces
Batch type Vacuum Heat Treatment Furnace FHB-60C
Horizontal type vacuum heat treatment furnace FHH series
Vertical type vacuum heat treatment furnace FHV series
Hot roller type vacuum heat treatment furnace FHHｎ series
NEW! SPH Series Load-lock type Sputtering System

[Components]
Eco-Shock Power-Saving Attachment
PVD Series Oil Rotary Vacuum Pumps (155 to 372 l/min)
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
PKS Series Oil Rotary Vacuum Pumps (1,600 to 7,000 l/min)
VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
YM-VD, YM-VS Series Evacuation Systems (1,580 to 20,000 l/min)
TM/TMX Series Oil Mist Traps
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

Software for Gas Analysis Qulee QCS
Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Helium Leak Tester (COMPACT-ALT) CLT Series
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
MESEC Non-Contact Metal Film Thickness Measurement System
NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000
RFS-A Series RF Power Supplies
DCS series DC Power Supplies
NEW! Equipment diagnostic system FABISEQ

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