ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Research & Development

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■ Research & Development

Multi-chamber Sputtering System Magest^TM S200
Dry Etching System for Opto-Devices, MEMS NLD-5700
CE-300I High-Density Plasma Etching System for R&D
Si Deep Etching System NLD-500Si, NLD-6000Si
Ashing System Luminous NA-1000/1300
NEW! Dry Etching Tool APIOS NE-950EX
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Multi-chamber Sputtering System MLX^TM-3000N
Low-k Interlayer Dielectric Film Materials with Enhanced Plasma Damage Resistance ULKS Ver.3
Inkjet Printing System S-200
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
Cluster type Sputtrering System SME-200E
Backside Metalization Sputtering System SRH-420
Sputteing System for Optical Filters and Coating ULDiS Series
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
NEW! Compact Sputter for Research & Development CS-L
NEW! Compact Etcher for Reserch & Development CE-L
Organic Material Evaporation System for R&D Mini-Lab
MPS Series Ultra-High Vacuum Sputter Systems for R&D
MBC-1000/2000 Molecular Beam Epitaxy Systems
CN-CVD-400 Carbon Nanotube Growth Experimenting System
GCIB-25 Gas Cluster Ion Source
TDS-2001 Outgas Measuring Instrument
Drying Furnace AMF-1000 ACF-500 ASF-500
NEW! Micropowderdry^TM System μPD Series

[Components]
PST-030CU/AU Acter Pumps
PST-050CU/AU Acter Pumps
PST-100CX/100AX Acter Pumps
PST-200CX2/200AX2 Acter Pumps
PST-400CX2/400AX2 Acter Pumps
GST-07L Ion Pump Control
PVD Series Oil Rotary Vacuum Pumps (155 to 372 l/min)
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
PKS Series Oil Rotary Vacuum Pumps (1,600 to 7,000 l/min)
VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
YM-VD, YM-VS Series Evacuation Systems (1,580 to 20,000 l/min)
TM/TMX Series Oil Mist Traps
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
NEW! Equipment diagnostic system FABISEQ

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