
| ■ Research & Development |
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Multi-chamber Sputtering System MagestTM S200
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Dry Etching System for Opto-Devices, MEMS NLD-5700
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CE-300I High-Density Plasma Etching System for R&D
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Si Deep Etching System NLD-500Si, NLD-6000Si
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Ashing System Luminous NA-1000/1300
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NEW! Dry Etching Tool APIOS NE-950EX
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Dry Etching System for Production NE-5700/NE-7800
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Dry Etching System for R&D NLD-570
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Multi-chamber Sputtering System MLXTM-3000N
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Low-k Interlayer Dielectric Film Materials with Enhanced Plasma Damage Resistance ULKS Ver.3
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Inkjet Printing System S-200
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Load-lock type Evaporation System CV-200
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Load-lock type Sputtering System CS-200
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Load-lock type Plasma-CVD System CC-200/400
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Multi-chamber type Evaporation System EME-400
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Small Evaporation System for R&D EX-200
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Cluster type Sputtrering System SME-200E
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Backside Metalization Sputtering System SRH-420
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Sputteing System for Optical Filters and Coating ULDiS Series
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Cluster-type PE-CVD System CME-200E/400
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Batch type High Vacuum Evaroration System ei Series
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Organic Material Evaporation System for R&D Mini-Lab
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MPS Series Ultra-High Vacuum Sputter Systems for R&D
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MBC-1000/2000 Molecular Beam Epitaxy Systems
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CN-CVD-400 Carbon Nanotube Growth Experimenting System
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GCIB-25 Gas Cluster Ion Source
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TDS-2001 Outgas Measuring Instrument
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Drying Furnace AMF-1000 ACF-500 ASF-500
- [Components]
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PST-030CU/AU Acter Pumps
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PST-050CU/AU Acter Pumps
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PST-100CX/100AX Acter Pumps
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PST-200CX2/200AX2 Acter Pumps
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PST-400CX2/400AX2 Acter Pumps
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GST-07L Ion Pump Control
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PVD Series Oil Rotary Vacuum Pumps (155 to 372 l/min)
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VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
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PKS Series Oil Rotary Vacuum Pumps (1,600 to 7,000 l/min)
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VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
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YM-VD, YM-VS Series Evacuation Systems (1,580 to 20,000 l/min)
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TM/TMX Series Oil Mist Traps
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PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
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PRC-A Series Mechanical Booster Pumps
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NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
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NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
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NEW! Leak Detector HELIOT 710 Series
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NEW! Leak Detector HELIOT ZERO
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Dektak 8 Stylus Surface Profiler
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Dektak 150 Stylus Surface Profiler
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CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
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Vacuum Robot COVOT
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Vacuum Robot KEYTRAN-IV Z
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Small Vacuum Transfer Module NCH-mono
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NEW! Equipment diagnostic system FABISEQ
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