| ■ Research & Development |
-
Multi-chamber Sputtering System MagestTM S200
-
Dry Etching System for Opto-Devices, MEMS NLD-5700
-
CE-300I High-Density Plasma Etching System for R&D
-
Si Deep Etching System NLD-500Si, NLD-6000Si
-
Ashing System Luminous NA-1000/1300
-
NEW! Dry Etching Tool APIOS NE-950EX
-
Dry Etching System for Production NE-5700/NE-7800
-
Dry Etching System for R&D NLD-570
-
Multi-chamber Sputtering System MLXTM-3000N
-
Low-k Interlayer Dielectric Film Materials with Enhanced Plasma Damage Resistance ULKS Ver.3
-
Inkjet Printing System S-200
-
Load-lock type Evaporation System CV-200
-
Load-lock type Sputtering System CS-200
-
Load-lock type Plasma-CVD System CC-200/400
-
Multi-chamber type Evaporation System EME-400
-
Small Evaporation System for R&D EX-200
-
Cluster type Sputtrering System SME-200E
-
Backside Metalization Sputtering System SRH-420
-
Sputteing System for Optical Filters and Coating ULDiS Series
-
Cluster-type PE-CVD System CME-200E/400
-
Batch type High Vacuum Evaroration System ei Series
-
Organic Material Evaporation System for R&D Mini-Lab
-
MPS Series Ultra-High Vacuum Sputter Systems for R&D
-
MBC-1000/2000 Molecular Beam Epitaxy Systems
-
CN-CVD-400 Carbon Nanotube Growth Experimenting System
-
GCIB-25 Gas Cluster Ion Source
-
TDS-2001 Outgas Measuring Instrument
-
Drying Furnace AMF-1000 ACF-500 ASF-500
- [Components]
-
PST-030CU/AU Acter Pumps
-
PST-050CU/AU Acter Pumps
-
PST-100CX/100AX Acter Pumps
-
PST-200CX2/200AX2 Acter Pumps
-
PST-400CX2/400AX2 Acter Pumps
-
GST-07L Ion Pump Control
-
PVD Series Oil Rotary Vacuum Pumps (155 to 372 l/min)
-
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
-
PKS Series Oil Rotary Vacuum Pumps (1,600 to 7,000 l/min)
-
VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
-
YM-VD, YM-VS Series Evacuation Systems (1,580 to 20,000 l/min)
-
TM/TMX Series Oil Mist Traps
-
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
-
PRC-A Series Mechanical Booster Pumps
-
NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
-
NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
-
NEW! Leak Detector HELIOT 710 Series
-
NEW! Leak Detector HELIOT ZERO
-
Dektak 8 Stylus Surface Profiler
-
Dektak 150 Stylus Surface Profiler
-
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
-
Vacuum Robot COVOT
-
Vacuum Robot KEYTRAN-IV Z
-
Small Vacuum Transfer Module NCH-mono
-
NEW! Equipment diagnostic system FABISEQ
|
|
|
Product Information
Contact List 
ULVAC, Inc. All rights reserved.