ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Biotechnologies

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Home Product Information Biotechnologies（by Applications）

■ Biotechnologies

MAGEST S200 Magnetic Multilayer Cluster Tool
Dry Etching System for Opto-Devices, MEMS NLD-5700
CE-300I High-Density Plasma Etching System for R&D
Si Deep Etching System NLD-500Si, NLD-6000Si
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Inkjet Printing System S-200
NEW! Compact Etcher for Reserch & Development CE-L
CN-CVD-400 Carbon Nanotube Growth Experimenting System
VEP Series Organic/Inorganic Compound Deposition Systems
NEW! Micropowderdry^TM System μPD Series

[Components]
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
Vacuum Cluster Tool Integration Platform NCH-4000
Vacuum Transfer Module NCP-6000

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