ULVAC, Inc. For Industrial Applications Of Vacuum Technology:MEMS

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■ MEMS

Dry Etching System for Opto-Devices, MEMS NLD-5700
CE-300I High-Density Plasma Etching System for R&D
Si Deep Etching System NLD-500Si, NLD-6000Si
NEW! Dry Etching Tool APIOS NE-950EX
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Ashing System Luminous NA-1000/1300
Inkjet Printing System S-200
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
Cluster type Sputtrering System SME-200E
Sputteing System for Optical Filters and Coating ULDiS Series
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
MPS Series Ultra-High Vacuum Sputter Systems for R&D
COMPACT SPUTTER ACS-4000
CN-CVD-400 Carbon Nanotube Growth Experimenting System
GCIB-25 Gas Cluster Ion Source
Drying Furnace AMF-1000 ACF-500 ASF-500

[Components]
ER Series Energy-Saving Dry Pumps
Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
G-Tran Series
G-Tran Series Pirani Gauge Measuring Units
G-Tran Series Hot Cathode Gauge Box Unit
G-Tran Series Cold Cathode Gauge Measuring Units
G-Tran Series 4-Channel Display Units
Pirani Vacuum Gauge GP-G Series
GP-1000G Digital Pirani Vacuum Gauge
GI-D7/GI-N8 Digital Ionization Vacuum Gauges
GI-M2/GI-D7 Ionization Vacuum Gauge
AxTRAN Extremely High Vacuum Gauge
GI-PA/GI-PARY Analog Penning Vacuum Gauges
GM-1000/GM-2000 Ceramic Capacitance Manometer Controllers
CCM-A Series Ceramic Capacitance Manometers
NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
REPROS Process Monitors for Reaction Gas
Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 8 Stylus Surface Profiler
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
RFS-A Series RF Power Supplies
DCS series DC Power Supplies
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
Vacuum Cluster Tool Integration Platform NCH-4000
Vacuum Transfer Module NCP-6000
NEW! Equipment diagnostic system FABISEQ

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