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■ Optical Devices, Optical Communication, Communication Medias Dry Etching System for Opto-Devices, MEMS NLD-5700 CE-300I High-Density Plasma Etching System for R&D Si Deep Etching System NLD-500Si, NLD-6000Si Ashing System Luminous NA-1000/1300 NEW! Dry Etching Tool APIOS NE-950EX Dry Etching System for Production NE-5700/NE-7800 Dry Etching System for R&D NLD-570 Multi-chamber Sputtering System MLXTM-3000N Load-lock type Evaporation System CV-200 Load-lock type Sputtering System CS-200 Load-lock type Plasma-CVD System CC-200/400 Multi-chamber type Evaporation System EME-400 Cluster type Sputtrering System SME-200E Backside Metalization Sputtering System SRH-420 Sputteing System for Optical Filters and Coating ULDiS Series Cluster-type PE-CVD System CME-200E/400 Batch type High Vacuum Evaroration System ei Series NEW! Batch-type Sputtering System SX-200/400 NEW! Compact Sputter for Research & Development CS-L MPS Series Ultra-High Vacuum Sputter Systems for R&D MBC-1000/2000 Molecular Beam Epitaxy Systems GCIB-25 Gas Cluster Ion Source Drying Furnace AMF-1000 ACF-500 ASF-500 EW Series Evaporation Roll Coater SPW-030 Sputtering Roll Coater SPW Series Sputtering Coating Machine (Roll Coater Type) [Components] Dry Pumps LR/HR Series Eco-Shock Power-Saving Attachment UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps YTP Series Turbo Molecular Pump Evacuation Units UTM Series Pivot Bearing Type Turbo Molecular Pumps Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302 Leak Tester HELIOT model 101 Leak Tester HELIOT model 102 Leak Tester HELIOT model 103 NEW! Leak Detector HELIOT 710 Series NEW! Leak Detector HELIOT ZERO Dektak 150 Stylus Surface Profiler CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000 RFS-A Series RF Power Supplies DCS series DC Power Supplies Vacuum Robot COVOT Vacuum Robot KEYTRAN-IV Z NEW! Equipment diagnostic system FABISEQ

Semiconductor Equipment Electric/Electronics Equipment Display Manufacturing Equipment Equipment for the Optical Products Industry MEMS Biosensor Equipment for the Metals/Machinery Industries Equipment for the Chemical/Pharmaceutical/ Food Industries R&D Materials Dry Pumps Oil Rotary Vacuum Pumps Mechanical Booster Pumps Ion Pumps Turbo Molecular Pump Oil Diffusion Pumps Cryo Pumps Other Pumps Vacuum Valves Vacuum Gauges Gas Analyzers Leak Detectors Film Thickness / Surface Profile Measurement Flanges Parts Power Supplies / EB Gun Vacuum Robot & Cluster Software Nonvolatile Memories Memory Logic CCD/CMOS Image Sensors Compound Semiconductors SiC Power Devices Si Power Devices Discrete Semiconductors High Density Packaging Liquid Crystal Display (LCD) Plasma Display Panel (PDP) Organic Electroluminescence Color Filters Field Emission Display Hard Disk Sensors SAW Devices Optical Disk Optical Devices Vacuum Heating Treatment MEMS Biotechnologies Life Sience Chemical, Food, Pharmaceutical Industries Research & Development Environment Automobile Metals, Machinery Industries Photovoltaics Secondary Batteries Surface Treatment Test and Analysis Materials Semiconductor Equipment Division FPD Division/PV(Photovoltaic) Division Advanced Electronics Equipment Division Industrial Equipment Division Components Division Control Solutions Division Materials Division