ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Sensors

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Dry Etching System for Opto-Devices, MEMS NLD-5700
CE-300I High-Density Plasma Etching System for R&D
Si Deep Etching System NLD-500Si, NLD-6000Si
Ashing System Luminous NA-1000/1300
NEW! Dry Etching Tool APIOS NE-950EX
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Multi-chamber Sputtering System MLX^TM-3000N
Inkjet Printing System S-200
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
Sputteing System for Optical Filters and Coating ULDiS Series
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
Organic Material Evaporation System for R&D Mini-Lab
MBC-1000/2000 Molecular Beam Epitaxy Systems
MPS Series Ultra-High Vacuum Sputter Systems for R&D
COMPACT SPUTTER ACS-4000
Drying Furnace AMF-1000 ACF-500 ASF-500
VEP Series Organic/Inorganic Compound Deposition Systems

[Components]
ER Series Energy-Saving Dry Pumps
Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
YTP Series Turbo Molecular Pump Evacuation Units
UTM Series Pivot Bearing Type Turbo Molecular Pumps
NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
Vacuum Robot KEYTRAN-IV Z
NEW! Equipment diagnostic system FABISEQ

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