ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Optical Disk

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Home Product Information Optical Disk（by Applications）

■ Optical Disk

Dry Etching System for Opto-Devices, MEMS NLD-5700
CE-300I High-Density Plasma Etching System for R&D
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Multi-chamber Sputtering System MLX^TM-3000N
MBC-1000/2000 Molecular Beam Epitaxy Systems
COMPACT SPUTTER ACS-4000
Drying Furnace AMF-1000 ACF-500 ASF-500

[Components]
Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
YTP Series Turbo Molecular Pump Evacuation Units
UTM Series Pivot Bearing Type Turbo Molecular Pumps
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000
DCS series DC Power Supplies
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z

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