Global
Home
Product Information
Optical Disk(by Applications)
■ Optical Disk
Dry Etching System for Opto-Devices, MEMS NLD-5700
CE-300I High-Density Plasma Etching System for R&D
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Multi-chamber Sputtering System MLX
TM
-3000N
MBC-1000/2000 Molecular Beam Epitaxy Systems
COMPACT SPUTTER ACS-4000
Drying Furnace AMF-1000 ACF-500 ASF-500
[Components]
Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
YTP Series Turbo Molecular Pump Evacuation Units
UTM Series Pivot Bearing Type Turbo Molecular Pumps
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW!
Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302
Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
NEW!
Leak Detector HELIOT 710 Series
NEW!
Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
NEW!
Compact High-speed Spectroscopic Ellipsometer UNECS-2000
DCS series DC Power Supplies
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Semiconductor Equipment
Electric/Electronics Equipment
Display Manufacturing Equipment
Equipment for the Optical Products Industry
MEMS
Biosensor
Equipment for the Metals/Machinery Industries
Equipment for the Chemical/Pharmaceutical/
Food Industries
R&D
Materials
Dry Pumps
Oil Rotary Vacuum Pumps
Mechanical Booster Pumps
Ion Pumps
Turbo Molecular Pump
Oil Diffusion Pumps
Cryo Pumps
Other Pumps
Vacuum Valves
Vacuum Gauges
Gas Analyzers
Leak Detectors
Film Thickness / Surface Profile Measurement
Flanges
Parts
Power Supplies / EB Gun
Vacuum Robot & Cluster
Software
Nonvolatile Memories
Memory
Logic
CCD/CMOS Image Sensors
Compound Semiconductors
SiC Power Devices
Si Power Devices
Discrete Semiconductors
High Density Packaging
Liquid Crystal Display (LCD)
Plasma Display Panel (PDP)
Organic Electroluminescence
Color Filters
Field Emission Display
Hard Disk
Sensors
SAW Devices
Optical Disk
Optical Devices
Vacuum Heating Treatment
MEMS
Biotechnologies
Life Sience
Chemical, Food, Pharmaceutical Industries
Research & Development
Environment
Automobile
Metals, Machinery Industries
Photovoltaics
Secondary Batteries
Surface Treatment
Test and Analysis
Materials
Semiconductor Equipment Division
FPD Division/PV(Photovoltaic) Division
Advanced Electronics Equipment Division
Industrial Equipment Division
Components Division
Control Solutions Division
Materials Division