ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Hard Disk

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Multi-chamber Sputtering System Magest^TM S200
CE-300I High-Density Plasma Etching System for R&D
Dry Etching System for Production NE-5700/NE-7800
Multi-chamber Sputtering System MLX^TM-3000N
MPS Series Ultra-High Vacuum Sputter Systems for R&D
COMPACT SPUTTER ACS-4000
Drying Furnace AMF-1000 ACF-500 ASF-500
SPW-030 Sputtering Roll Coater
SPW Series Sputtering Coating Machine (Roll Coater Type)
Horizontal type vacuum heat treatment furnace FHH series
Vertical type vacuum heat treatment furnace FHV series
Hot roller type vacuum heat treatment furnace FHHｎ series

[Components]
Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
YTP Series Turbo Molecular Pump Evacuation Units
UTM Series Pivot Bearing Type Turbo Molecular Pumps
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
NEW! Compact High-speed Spectroscopic Ellipsometer UNECS-2000
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z

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