ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Organic Electroluminescence

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Home Product Information Organic Electroluminescence（by Applications）

■ Organic Electroluminescence

In-line sputter systems New SDP-s Series
Single-substrate plasma CVD systems CMD Series
Organic EL manufacturing systems SOLCIET,SATELLA,NEW-ZELDA
Inkjet Printing System S-200
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Cluster-type PE-CVD System CME-200E/400
Organic Material Evaporation System for R&D Mini-Lab
Drying Furnace AMF-1000 ACF-500 ASF-500
VEP Series Organic/Inorganic Compound Deposition Systems

[Components]
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z

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