ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Discrete Semiconductors

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Home Product Information Discrete Semiconductors（by Applications）

■ Discrete Semiconductors

NEW!Multi-chamber Sputtering System ENTRON^TM-EX2 W300
CE-300I High-Density Plasma Etching System for R&D
Si Deep Etching System NLD-500Si, NLD-6000Si
Ashing System Luminous NA-1000/1300
High-Temp Ion Implanter for SiC IH-860DSIC
Medium current Ion Implanter SOPHI-200
NEW! Dry Etching Tool APIOS NE-950EX
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Multi-chamber Sputtering System MLX^TM-3000N
SPW-030 Sputtering Roll Coater
SPW Series Sputtering Coating Machine (Roll Coater Type)

[Components]
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW! Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302

Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
YTP Series Turbo Molecular Pump Evacuation Units
UTM Series Pivot Bearing Type Turbo Molecular Pumps
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
Vacuum Cluster Tool Integration Platform NCH-4000
Vacuum Transfer Module NCP-6000

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