Global
Home
Product Information
Si Power Devices(by Applications)
■ Si Power Devices
CE-300I High-Density Plasma Etching System for R&D
Si Deep Etching System NLD-500Si, NLD-6000Si
Ashing System Luminous NA-1000/1300
High-Temp Ion Implanter for SiC IH-860DSIC
Medium current Ion Implanter SOPHI-200
NEW!
Dry Etching Tool APIOS NE-950EX
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Dry Etching System for Production NE-5700/NE-7800
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
Cluster type Sputtrering System SME-200E
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
NEW!
Compact Sputter for Research & Development CS-L
NEW!
Compact Etcher for Reserch & Development CE-L
[Components]
NEW!
Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302
NEW!
Compact High-speed Spectroscopic Ellipsometer UNECS-2000
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
Vacuum Cluster Tool Integration Platform NCH-4000
Vacuum Transfer Module NCP-6000
NEW!
Equipment diagnostic system FABISEQ
Semiconductor Equipment
Electric/Electronics Equipment
Display Manufacturing Equipment
Equipment for the Optical Products Industry
MEMS
Biosensor
Equipment for the Metals/Machinery Industries
Equipment for the Chemical/Pharmaceutical/
Food Industries
R&D
Materials
Dry Pumps
Oil Rotary Vacuum Pumps
Mechanical Booster Pumps
Ion Pumps
Turbo Molecular Pump
Oil Diffusion Pumps
Cryo Pumps
Other Pumps
Vacuum Valves
Vacuum Gauges
Gas Analyzers
Leak Detectors
Film Thickness / Surface Profile Measurement
Flanges
Parts
Power Supplies / EB Gun
Vacuum Robot & Cluster
Software
Nonvolatile Memories
Memory
Logic
CCD/CMOS Image Sensors
Compound Semiconductors
SiC Power Devices
Si Power Devices
Discrete Semiconductors
High Density Packaging
Liquid Crystal Display (LCD)
Plasma Display Panel (PDP)
Organic Electroluminescence
Color Filters
Field Emission Display
Hard Disk
Sensors
SAW Devices
Optical Disk
Optical Devices
Vacuum Heating Treatment
MEMS
Biotechnologies
Life Sience
Chemical, Food, Pharmaceutical Industries
Research & Development
Environment
Automobile
Metals, Machinery Industries
Photovoltaics
Secondary Batteries
Surface Treatment
Test and Analysis
Materials
Semiconductor Equipment Division
FPD Division/PV(Photovoltaic) Division
Advanced Electronics Equipment Division
Industrial Equipment Division
Components Division
Control Solutions Division
Materials Division