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Compound Semiconductors(LED/LD/RF Devices)(by Applications)
■ Compound Semiconductors(LED/LD/RF Devices)
CE-300I High-Density Plasma Etching System for R&D
Si Deep Etching System NLD-500Si, NLD-6000Si
Ashing System Luminous NA-1000/1300
Medium current Ion Implanter SOPHI-200
NEW!
Dry Etching Tool APIOS NE-950EX
Dry Etching System for Production NE-5700/NE-7800
Dry Etching System for R&D NLD-570
Multi-chamber Sputtering System MLX
TM
-3000N
Load-lock type Evaporation System CV-200
Load-lock type Sputtering System CS-200
Load-lock type Plasma-CVD System CC-200/400
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
Cluster type Sputtrering System SME-200E
Sputteing System for Optical Filters and Coating ULDiS Series
Cluster-type PE-CVD System CME-200E/400
Batch type High Vacuum Evaroration System ei Series
NEW!
Batch-type Sputtering System SX-200/400
MPS Series Ultra-High Vacuum Sputter Systems for R&D
MBC-1000/2000 Molecular Beam Epitaxy Systems
COMPACT SPUTTER ACS-4000
NEW!
Compact Sputter for Research & Development CS-L
NEW!
Compact Etcher for Reserch & Development CE-L
Drying Furnace AMF-1000 ACF-500 ASF-500
[Components]
PST-100CX/100AX Acter Pumps
PST-200CX2/200AX2 Acter Pumps
PST-400CX2/400AX2 Acter Pumps
GST-07L Ion Pump Control
Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
PRC-A, PMB-C(M)/B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
YTP Series Turbo Molecular Pump Evacuation Units
UTM Series Pivot Bearing Type Turbo Molecular Pumps
G-Tran Series
G-Tran Series Pirani Gauge Measuring Units
G-Tran Series Hot Cathode Gauge Box Unit
G-Tran Series Cold Cathode Gauge Measuring Units
G-Tran Series 4-Channel Display Units
Pirani Vacuum Gauge GP-G Series
GP-1000G Digital Pirani Vacuum Gauge
GI-D7/GI-N8 Digital Ionization Vacuum Gauges
GI-M2/GI-D7 Ionization Vacuum Gauge
AxTRAN Extremely High Vacuum Gauge
GI-PA/GI-PARY Analog Penning Vacuum Gauges
ISG1/GM-2000 Ceramic Capacitance Manometer Controllers
CCM-A Series Ceramic Capacitance Manometers
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW!
Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302
Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
NEW!
Leak Detector HELIOT 710 Series
NEW!
Leak Detector HELIOT ZERO
Dektak 150 Stylus Surface Profiler
NEW!
Compact High-speed Spectroscopic Ellipsometer UNECS-2000
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
MESEC Non-Contact Metal Film Thickness Measurement System
RFS-A Series RF Power Supplies
DCS series DC Power Supplies
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
Vacuum Cluster Tool Integration Platform NCH-4000
Vacuum Transfer Module NCP-6000
Semiconductor Equipment
Electric/Electronics Equipment
Display Manufacturing Equipment
Equipment for the Optical Products Industry
MEMS
Biosensor
Equipment for the Metals/Machinery Industries
Equipment for the Chemical/Pharmaceutical/
Food Industries
R&D
Materials
Dry Pumps
Oil Rotary Vacuum Pumps
Mechanical Booster Pumps
Ion Pumps
Turbo Molecular Pump
Oil Diffusion Pumps
Cryo Pumps
Other Pumps
Vacuum Valves
Vacuum Gauges
Gas Analyzers
Leak Detectors
Film Thickness / Surface Profile Measurement
Flanges
Parts
Power Supplies / EB Gun
Vacuum Robot & Cluster
Software
Nonvolatile Memories
Memory
Logic
CCD/CMOS Image Sensors
Compound Semiconductors
SiC Power Devices
Si Power Devices
Discrete Semiconductors
High Density Packaging
Liquid Crystal Display (LCD)
Plasma Display Panel (PDP)
Organic Electroluminescence
Color Filters
Field Emission Display
Hard Disk
Sensors
SAW Devices
Optical Disk
Optical Devices
Vacuum Heating Treatment
MEMS
Biotechnologies
Life Sience
Chemical, Food, Pharmaceutical Industries
Research & Development
Environment
Automobile
Metals, Machinery Industries
Photovoltaics
Secondary Batteries
Surface Treatment
Test and Analysis
Materials
Semiconductor Equipment Division
FPD Division/PV(Photovoltaic) Division
Advanced Electronics Equipment Division
Industrial Equipment Division
Components Division
Control Solutions Division
Materials Division