ULVAC, Inc. For Industrial Applications Of Vacuum Technology:Memory

■ Memory

Multi-chamber Metallization System ENTRON^TM-EX W300
CE-300I High-Density Plasma Etching System for R&D
Ashing System Luminous NA-1000/1300
High-Temp Ion Implanter for SiC IH-860DSIC
Medium current Ion Implantor SOPHI-200
Multi-chamber Sputtering System MLX^TM-3000N
A Batch System to Remove Native Oxide RISE^TM-300
Low-k Interlayer Dielectric Film Materials with Enhanced Plasma Damage Resistance ULKS Ver.3
Drying Furnace AMF-1000 ACF-500 ASF-500

[Components]
PST-030CU/AU Acter Pumps
PST-050CU/AU Acter Pumps
PST-100CX/100AX Acter Pumps
PST-200CX2/200AX2 Acter Pumps
PST-400CX2/400AX2 Acter Pumps
NEW! Leak Detector HELIOT 710 Series
NEW! Leak Detector HELIOT ZERO
PRC-A, PMB-C(M) / B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
YTP Series Turbo Molecular Pump Evacuation Units
UTM Series Pivot Bearing Type Turbo Molecular Pumps
G-Tran Series
G-Tran Series Pirani Gauge Measuring Units
G-Tran Series Hot Cathode Gauge Box Unit
G-Tran Series Cold Cathode Gauge Measuring Units
G-Tran Series 4-Channel Display Units
Pirani Vacuum Gauge GP-G Series
GP-1000G Digital Pirani Vacuum Gauge
GI-D7/GI-N8 Digital Ionization Vacuum Gauges
GI-M2/GI-D7 Ionization Vacuum Gauge
AxTRAN Extremely High Vacuum Gauge
GI-PA/GI-PARY Analog Penning Vacuum Gauges
GM-1000/GM-2000 Ceramic Capacitance Manometer Controllers
CCM-A Series Ceramic Capacitance Manometers
NEW! Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
NEW! Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
REPROS Process Monitors for Reaction Gas
Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
Dektak 150 Stylus Surface Profiler
MESEC Non-Contact Metal Film Thickness Measurement System
RFS-A Series RF Power Supplies
DCS series DC Power Supplies
Vacuum Robot COVOT
Vacuum Robot KEYTRAN-IV Z
Small Vacuum Transfer Module NCH-mono
Vacuum Cluster Tool Integration Platform NCH-4000
Vacuum Transfer Module NCP-6000