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■ Semiconductor Equipment Division Multi-chamber Metallization System ENTRONTM-EX W300 NEW!Multi-chamber Sputtering System ENTRONTM-EX2 W300 Multi-chamber Sputtering System MagestTM S200 Multi-chamber Sputtering System MLXTM-3000N High Density Plasma Dry Etcher ULHITETM NE-7800H ENTRONTM-PVD/CVD Metallization System for 300 mm Wafers A Batch System to Remove Native Oxide RISETM-300 Low-k Interlayer Dielectric Film Materials with Enhanced Plasma Damage Resistance ULKS Ver.3

Semiconductor Equipment Electric/Electronics Equipment Display Manufacturing Equipment Equipment for the Optical Products Industry MEMS Biosensor Equipment for the Metals/Machinery Industries Equipment for the Chemical/Pharmaceutical/ Food Industries R&D Materials Dry Pumps Oil Rotary Vacuum Pumps Mechanical Booster Pumps Ion Pumps Turbo Molecular Pump Oil Diffusion Pumps Cryo Pumps Other Pumps Vacuum Valves Vacuum Gauges Gas Analyzers Leak Detectors Film Thickness / Surface Profile Measurement Flanges Parts Power Supplies / EB Gun Vacuum Robot & Cluster Software Nonvolatile Memories Memory Logic CCD/CMOS Image Sensors Compound Semiconductors SiC Power Devices Si Power Devices Discrete Semiconductors High Density Packaging Liquid Crystal Display (LCD) Plasma Display Panel (PDP) Organic Electroluminescence Color Filters Field Emission Display Hard Disk Sensors SAW Devices Optical Disk Optical Devices Vacuum Heating Treatment MEMS Biotechnologies Life Sience Chemical, Food, Pharmaceutical Industries Research & Development Environment Automobile Metals, Machinery Industries Photovoltaics Secondary Batteries Surface Treatment Test and Analysis Materials Semiconductor Equipment Division FPD Division/PV(Photovoltaic) Division Advanced Electronics Equipment Division Industrial Equipment Division Components Division Control Solutions Division Materials Division