Global
Home
Product Information
Advanced Electronics Equipment Division(by Divisions)
■ Advanced Electronics Equipment Division
[Sputtering System]
Sputtering System for Optical Filters and Coating ULDiS Series
Cluster type Sputtering System SME-200E
Load-lock type Sputtering System CS-200
Backside Metalization Sputtering System SRH Series
Batch-type sputtering systems SV Series
NEW!
Batch-type Sputtering System SX-200/400
MPS Series Ultra-High Vacuum Sputter Systems for R&D
COMPACT SPUTTER ACS-4000
NEW!
Compact Sputter for Research & Development CS-L
[CVD System]
Load-lock type Plasma-CVD System CC-200/400
Cluster-type PE-CVD System CME-200E/400
CN-CVD-400 Carbon Nanotube Growth Experimenting System
[Evaporation System]
Organic Material Evaporation System for R&D Mini-Lab
Batch type High Vacuum Evaroration System ei Series
Load-lock type Evaporation System CV-200
Multi-chamber type Evaporation System EME-400
Small Evaporation System for R&D EX-200
[Dry Etching System]
Dry Etching System for R&D NLD-570
Dry Etching System for Opto-Devices, MEMS NLD-5700
Si Deep Etching System NLD-5700Si
NE-550/CE-300I High-Density Plasma Etching System for R&D
Dry Etching Tool APIOS NE-950EX
Dry Etching System for Production NE-5700/NE-7800
NEW!
Compact Etcher for Reserch & Development CE-L
[Ashing System]
Ashing System Luminous NA Series
[Ion Implanter]
Medium current Ion Implanter SOPHI-200/260
High-Temp Ion Implanter for SiC IH-860DSIC
[Others]
Drying Furnace AMF-1000 ACF-500 ASF-500
PST-030CU/AU Acter Pumps
PST-050CU/AU Acter Pumps
PST-100CX/100AX Acter Pumps
PST-200CX2/200AX2 Acter Pumps
PST-400CX2/400AX2 Acter Pumps
GST-07L Ion Pump Control
GCIB-25 Gas Cluster Ion Source
MBC-1000/2000 Molecular Beam Epitaxy Systems
TDS-2001 Outgas Measuring Instrument
Semiconductor Equipment
Electric/Electronics Equipment
Display Manufacturing Equipment
Equipment for the Optical Products Industry
MEMS
Biosensor
Equipment for the Metals/Machinery Industries
Equipment for the Chemical/Pharmaceutical/
Food Industries
R&D
Materials
Dry Pumps
Oil Rotary Vacuum Pumps
Mechanical Booster Pumps
Ion Pumps
Turbo Molecular Pump
Oil Diffusion Pumps
Cryo Pumps
Other Pumps
Vacuum Valves
Vacuum Gauges
Gas Analyzers
Leak Detectors
Film Thickness / Surface Profile Measurement
Flanges
Parts
Power Supplies / EB Gun
Vacuum Robot & Cluster
Software
Nonvolatile Memories
Memory
Logic
CCD/CMOS Image Sensors
Compound Semiconductors
SiC Power Devices
Si Power Devices
Discrete Semiconductors
High Density Packaging
Liquid Crystal Display (LCD)
Plasma Display Panel (PDP)
Organic Electroluminescence
Color Filters
Field Emission Display
Hard Disk
Sensors
SAW Devices
Optical Disk
Optical Devices
Vacuum Heating Treatment
MEMS
Biotechnologies
Life Sience
Chemical, Food, Pharmaceutical Industries
Research & Development
Environment
Automobile
Metals, Machinery Industries
Photovoltaics
Secondary Batteries
Surface Treatment
Test and Analysis
Materials
Semiconductor Equipment Division
FPD Division/PV(Photovoltaic) Division
Advanced Electronics Equipment Division
Industrial Equipment Division
Components Division
Control Solutions Division
Materials Division