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■ Advanced Electronics Equipment Division [Sputtering System] Sputtering System for Optical Filters and Coating ULDiS Series Cluster type Sputtering System SME-200E Load-lock type Sputtering System CS-200 Backside Metalization Sputtering System SRH Series Batch-type sputtering systems SV Series NEW! Batch-type Sputtering System SX-200/400 MPS Series Ultra-High Vacuum Sputter Systems for R&D COMPACT SPUTTER ACS-4000 NEW! Compact Sputter for Research & Development CS-L [CVD System] Load-lock type Plasma-CVD System CC-200/400 Cluster-type PE-CVD System CME-200E/400 CN-CVD-400 Carbon Nanotube Growth Experimenting System [Evaporation System] Organic Material Evaporation System for R&D Mini-Lab Batch type High Vacuum Evaroration System ei Series Load-lock type Evaporation System CV-200 Multi-chamber type Evaporation System EME-400 Small Evaporation System for R&D EX-200 [Dry Etching System] Dry Etching System for R&D NLD-570 Dry Etching System for Opto-Devices, MEMS NLD-5700 Si Deep Etching System NLD-5700Si NE-550/CE-300I High-Density Plasma Etching System for R&D Dry Etching Tool APIOS NE-950EX Dry Etching System for Production NE-5700/NE-7800 NEW! Compact Etcher for Reserch & Development CE-L [Ashing System] Ashing System Luminous NA Series [Ion Implanter] Medium current Ion Implanter SOPHI-200/260 High-Temp Ion Implanter for SiC IH-860DSIC [Others] Drying Furnace AMF-1000 ACF-500 ASF-500 PST-030CU/AU Acter Pumps PST-050CU/AU Acter Pumps PST-100CX/100AX Acter Pumps PST-200CX2/200AX2 Acter Pumps PST-400CX2/400AX2 Acter Pumps GST-07L Ion Pump Control GCIB-25 Gas Cluster Ion Source MBC-1000/2000 Molecular Beam Epitaxy Systems TDS-2001 Outgas Measuring Instrument

Semiconductor Equipment Electric/Electronics Equipment Display Manufacturing Equipment Equipment for the Optical Products Industry MEMS Biosensor Equipment for the Metals/Machinery Industries Equipment for the Chemical/Pharmaceutical/ Food Industries R&D Materials Dry Pumps Oil Rotary Vacuum Pumps Mechanical Booster Pumps Ion Pumps Turbo Molecular Pump Oil Diffusion Pumps Cryo Pumps Other Pumps Vacuum Valves Vacuum Gauges Gas Analyzers Leak Detectors Film Thickness / Surface Profile Measurement Flanges Parts Power Supplies / EB Gun Vacuum Robot & Cluster Software Nonvolatile Memories Memory Logic CCD/CMOS Image Sensors Compound Semiconductors SiC Power Devices Si Power Devices Discrete Semiconductors High Density Packaging Liquid Crystal Display (LCD) Plasma Display Panel (PDP) Organic Electroluminescence Color Filters Field Emission Display Hard Disk Sensors SAW Devices Optical Disk Optical Devices Vacuum Heating Treatment MEMS Biotechnologies Life Sience Chemical, Food, Pharmaceutical Industries Research & Development Environment Automobile Metals, Machinery Industries Photovoltaics Secondary Batteries Surface Treatment Test and Analysis Materials Semiconductor Equipment Division FPD Division/PV(Photovoltaic) Division Advanced Electronics Equipment Division Industrial Equipment Division Components Division Control Solutions Division Materials Division