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Components Division(by Divisions)
■ Components Division
[Dry Pumps]
Dry Pumps LR/HR Series
Eco-Shock Power-Saving Attachment
[Oil Rotary Vacuum Pumps]
PVD Series Oil Rotary Vacuum Pumps (155 to 372 l/min)
VD Series Oil Rotary Vacuum Pumps (240 to 1800 l/min)
PKS Series Oil Rotary Vacuum Pumps (1,600 to 7,000 l/min)
VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)
YM-VD, YM-VS Series Evacuation Systems (1,580 to 20,000 l/min)
TM/TMX Series Oil Mist Traps
[Mechanical Booster Pumps]
PRC-A, PMB-C(M)/B Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
[Turbo Molecular Pump]
UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps
YTP Series Turbo Molecular Pump Evacuation Units
UTM Series Pivot Bearing Type Turbo Molecular Pumps
[Oil Diffusion Pumps]
ULK Series Oil Diffusion Pumps
[Titanium Getter Pumps]
PGT Series Titanium Getter Pumps
GGT-3 Power Supply for Titanium Getter Pumps
[Vacuum Valves]
VULP-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Pneumatic Operation and Bellows Shaft Seals
VULP-F Series Ultra-High Vacuum L-Valves (Vacuum Flange Type) With Pneumatic Operation and Bellows Shaft Seals
VULP-KF Series Ultra-High Vacuum L-Valves (KF Flange Type) With Pneumatic Operation and Bellows Shaft Seals
VUGP-CS Series Ultra-High Vacuum Gate Valves (Conflat Flange Type) With Pneumatic Operation and Bellows Shaft Seals
VUGP-F Series Ultra-High Vacuum Gate Valves (Vacuum Flange Type) With Pneumatic Operation and Bellows Shaft Seals
VAP Series High Vacuum Gate Valves With Pneumatic Operation and O-Ring Shaft Seals
VLP-US-KF Series High Vacuum L-Valves (With KF Flanges) With Pneumatic Operation and O-Ring Shaft Seals
VLP-U/US Series High Vacuum L-Valves (Vacuum Flange Type) With Pneumatic Operation and O-Ring Shaft Seals
VLH-U/US Series High Vacuum L-Valves (Vacuum Flange Type) With Manual Operation and O-Ring Shaft Seals
VLH-US-KF Series High Vacuum L-Valves (KF Flange Type) With Manual Operation and O-Ring Shaft Seals
VAH Series High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals
VULH-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals
VULH-F Series Ultra-High Vacuum L-Valves (Vacuum Flange Type) With Manual Operation and Bellows Shaft Seals
VULH-KF Series Ultra-High Vacuum L-Valves (KF Flange Type) With Manual Operation and Bellows Shaft Seals
VUGH-CS Series Ultra-High Vacuum Gate Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals
VUGH-F Series Ultra-High Vacuum Gate Valves (Vacuum Flange Type) With Manual Operation and Bellows Shaft Seals
10AI Series Manual Ultra-High Vacuum Air Inlet Valves
VUH Series Manual Ultra-High Vacuum Metal Valves (Conflat Flange Type)
VUH-MVF Manual Ultra-High Vacuum Mini Valve (Conflat Flange Type)
[Vacuum Gauges]
G-Tran Series
NEW!
G-TRAN series Atmosphric Pirani Gauge SW1
G-Tran Series Pirani Gauge Measuring Units
G-Tran Series Hot Cathode Gauge Box Unit
G-Tran Series Cold Cathode Gauge Measuring Units
NEW!
G-tran series 1CH Display Unit ISG1
G-Tran Series 4-Channel Display Units
Pirani Vacuum Gauge GP-G Series
GP-1000G Digital Pirani Vacuum Gauge
GI-M2/GI-D7 Ionization Vacuum Gauge
AxTRAN Extremely High Vacuum Gauge
GI-PA/GI-PARY Analog Penning Vacuum Gauges
ISG1/GM-2000 Ceramic Capacitance Manometer Controllers
NEW!
CCMT-D Series Ceramic Capacitance Manometers
[Gas Analyzers]
Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM
Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monito Qulee BGM
NEW!
Residual Gas Analysis/Process Gas Monitor High Performance Process Gas Monitor Qulee HGM
NEW!
Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302
NEW!
Quadurupole mass spectrometer with differential pumping kit Qulee with YTP Qulee with YTP
Software for Gas Analysis Qulee QCS
[Leak Detectors]
Leak Tester HELIOT model 101
Leak Tester HELIOT model 102
Leak Tester HELIOT model 103
NEW!
Leak Detector HELIOT 710 Series
NEW!
Leak Detector HELIOT ZERO
[Film Thickness / Surface Profile Measurement]
Dektak 150 Stylus Surface Profiler
CRTM-6000G Quartz Crystal Deposition Controller
CRTM-9000G Quartz Crystal Deposition Controller
CRTS-12 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
MESEC Non-Contact Metal Film Thickness Measurement System
NEW!
Compact High-speed Spectroscopic Ellipsometer UNECS-2000
[Flanges]
UFC Series Ultra-High Vacuum Flanges
Ultra-High Vacuum Conversion Flanges
[Parts]
TVU-FV Series Ultra-High Vacuum Zero Length Viewing Windows
TDU Series Ultra-High Vacuum Rotary Feedthroughs
TSU Series Ultra-High Vacuum Linear Feedthroughs
CMS Series Electrical Feedthroughs
[Power Supplies / EB Gun]
DCS series DC Power Supplies
HPS Series EB Power Supplies
EGK/EGL/EGO Series EB gun for vacuum evaporation
Semiconductor Equipment
Electric/Electronics Equipment
Display Manufacturing Equipment
Equipment for the Optical Products Industry
MEMS
Biosensor
Equipment for the Metals/Machinery Industries
Equipment for the Chemical/Pharmaceutical/
Food Industries
R&D
Materials
Dry Pumps
Oil Rotary Vacuum Pumps
Mechanical Booster Pumps
Ion Pumps
Turbo Molecular Pump
Oil Diffusion Pumps
Cryo Pumps
Other Pumps
Vacuum Valves
Vacuum Gauges
Gas Analyzers
Leak Detectors
Film Thickness / Surface Profile Measurement
Flanges
Parts
Power Supplies / EB Gun
Vacuum Robot & Cluster
Software
Nonvolatile Memories
Memory
Logic
CCD/CMOS Image Sensors
Compound Semiconductors
SiC Power Devices
Si Power Devices
Discrete Semiconductors
High Density Packaging
Liquid Crystal Display (LCD)
Plasma Display Panel (PDP)
Organic Electroluminescence
Color Filters
Field Emission Display
Hard Disk
Sensors
SAW Devices
Optical Disk
Optical Devices
Vacuum Heating Treatment
MEMS
Biotechnologies
Life Sience
Chemical, Food, Pharmaceutical Industries
Research & Development
Environment
Automobile
Metals, Machinery Industries
Photovoltaics
Secondary Batteries
Surface Treatment
Test and Analysis
Materials
Semiconductor Equipment Division
FPD Division/PV(Photovoltaic) Division
Advanced Electronics Equipment Division
Industrial Equipment Division
Components Division
Control Solutions Division
Materials Division