■NEWS 2004

December 22, 2004 Establishment of a New Company for Manufacturing General Industrial Vacuum Furnaces in China
ULVAC, Inc.
November 24, 2004 Launching next generation PVD/CVD tool for semiconductor processing "ENTRON"TM -EX W300 series"
ULVAC, Inc.
October 29, 2004 Release of NLD-based Silicon Deep Etching Systems for MEMS/NEMS Application
- Silicon deep etching based on the original technology of ULVAC -

ULVAC, Inc.
October 29, 2004 ULVAC receives order from iFire Technology for TDEL display production systems
ULVAC, Inc.
October 28, 2004 Affiliation of ULVAC Chengdu Co., Ltd., by Increasing Capital
ULVAC, Inc.
September 14, 2004 A vacuum evaporation roll coater for film capacitors successfully performs high-speed deposition
-Launch of a vacuum evaporation roll coater for film capacitors-

ULVAC, Inc.
September 2, 2004 Report on Program Jisso Consortium
(SiP prototype successfully produced and tested using inkjet techniques)

ULVAC, Inc.
July 22, 2004 Local Subsidiary Corporation Established in Russia
ULVAC, Inc.
July 6, 2004 Batch-type native oxide removal equipment for 300 mm launched
ULVAC, Inc.
July 1, 2004 Construction of new plant for vacuum pumps
ULVAC, Inc.
June 24, 2004 Affiliation of Shanghai Taidevelop Tecq Inc. through equity investment
ULVAC, Inc.
June 24, 2004 Construction of a new plant and establishment of a new company in the Republic of Korea
ULVAC, Inc.
May 28, 2004 Full scale operation of the plant of ULVAC (SUZHOU) Co., Ltd.
ULVAC, Inc.
April 6, 2004 ULVAC achieved the highest pumping speed in the world
Magnetic Levitation And Digital Type turbo molecular pump for large FPD

Mitsubishi Heavy Industries, Ltd., and ULVAC, Inc.
March 2, 2004 New Development of Interlayer Insulation Film Etching Technology Compatible with ArF Resist
- Striation-free etching achieved -

ULVAC, Inc.