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| 1952 | August | ULVAC is established as an importer and seller of vacuum equipment. |
| 1964 | January | Reliance Electric Ltd. is established by spinning off the Reliance Department, an ULVAC overseas department. The new company is capitalized jointly by ULVAC and the US company Reliance Electric and Engineering Co. (now known as Reliance Electric Limited). |
| October | Shinku Riko (now known as ULVAC-Riko, INC.) is established as a specialist manufacturer of thermal analyzers. | |
| 1966 | April | ULVAC Materials,Inc.(formerly Vacuum Metallurgical Co., Ltd.) is established by spinning off the ULVAC Vacuum Metallurgical Department. |
| 1971 | July | Sinku Kiko (now known as ULVAC Kiko, Inc.) is established as a specialist manufacturer of compact vacuum pumps, vacuum devices and peripheral devices. |
| 1972 | July | The Institute for Super Materials is established in Chiba. |
| 1975 | December | ULVAC North America Corp. (now known as ULVAC Technologies, Inc.) is established in Dover, Delaware, USA as a base for exports to the US. |
| 1978 | April | ULVAC forms an alliance with Showa Shinku Co. Ltd., a specialist manufacturer of LC oscillators and optical thin-film manufacturing equipment. |
| 1979 | January | ULVAC Service (now known as ULVAC Techno, Ltd.) is established by spinning off the ULVAC Service Department. |
| ULVAC Coating Corporation is established by spinning off the ULVAC SI Division. | ||
| 1981 | October | ULVAC Kyushu Co., Ltd. is established to expand sales activities in the Kyushu region. |
| ULVAC CRYOGENICS, INC. is established to manufacture and sell cryopumps, capitalized jointly by ULVAC and Helix Technology Corp. (CTI Cryogenics) (US). | ||
| 1982 | November | ULVAC-PHI, INC. is established to manufacture and sell surface analysis equipment, capitalized jointly by ULVAC and the Perkin Elmer Corp. (Physical Electronics Division) (US). |
| The Tsukuba Institute for Super Materials is established in Tsukuba Science City to expand research activities. | ||
| 1985 | April | ULVAC Seiki Co., Ltd. is established as a Kansai base plant. |
| 1987 | January | ULVAC Tohoku, Inc. is established in Hachinohe to strengthen ULVAC's large equipment production. |
| May | ULVAC CORPORATION (now known as ULVAC CORPORATE CENTER) is established to strengthen the connections between ULVAC Group members, and to increase efficiency by grouping together common business operations such as management guidance, technology development, patents, contracts and marketing. | |
| 1990 | May | Construction of a super clean plant at Fuji Susono finishes. The plant is designed to meet increasing demand for semiconductor manufacturing equipment and higher levels of performance. |
| 1994 | January | The ULVAC Technical Support Center opens to provide support for users' industrial engineering. |
| 1995 | April | The Semiconductor Equipment Division 1 receives ISO 9001 certification. |
| 1997 | July | The Industrial Engineering Center is established to improve ULVAC's industrial engineering capabilities, and create information systems. |
| 1998 | April | The Components Division receives ISO 9001 certification. |
| July | The Purchasing Center is created to strengthen ULVAC's purchasing and physical distribution departments. | |
| The US semiconductor research company VLSI Research Inc. describes ULVAC as "The most notably improved supplier". | ||
| The Electronics Equipment Group, Electronic Equipment Divisions 1 and 2, Control Solutions Division, Purchasing Department etc. receive ISO 9001 certification. | ||
| ULVAC starts ULVAC Solutions, a set of activities gathering the total capabilities of the ULVAC Group. | ||
| 1999 | January | The ULVAC Group starts dealing in used equipment. |
| February | The UHV Division (renamed as Advanced Equipment Division) and Control Solutions Division receive ISO 9001 certification. | |
| April | The Semiconductor Equipment Division 2 receives ISO 9001 certification. | |
| ULVAC forms a comprehensive alliance with Ramtron (US) for development of next-generation ferroelectric memory. | ||
| November | The surface analysis service company Phi-ULVAC Taiwan, LLC is established in Taiwan, jointly capitalized by Phi (US) and ULVAC Taiwan. | |
| The Industrial Equipment Division receives ISO 9001 certification. All ULVAC divisions and departments are now ISO 9001 certified. | ||
| The Entron metallization system for mass-production of 300 mm wafers is developed. | ||
| 2000 | April | ULVAC enters a technical alliance with Kodak (US) and Sanyo Electric Co., Ltd. to develop equipment for manufacturing organic EL displays. |
| July | The Satella organic EL production system wins Grand Prix in the equipment category of the 5th Advanced Display of the Year award. | |
| 2001 | February | The Institute for Semiconductor Technologies in Susono starts full-scale operation. |
| March | The Chigasaki Head Office Plant and Fuji Susono Plant receive ISO 14001 certification. | |
| April | The Semiconductor Equipment Division 2 moves to the Susono Plant, gathering semiconductor business to Susono. | |
| July | The company name is changed from ULVAC Japan, Ltd. to ULVAC, Inc. | |
| November | ULVAC Taiwan's CIP (Continuous Improvement Program) plant opens in Taoyuan, Taiwan. | |
| 2002 | January | ULVAC Singapore Pte Ltd. is established, capitalized jointly by ULVAC, Vacuum Metallurgical Co., Ltd.(now known as ULVAC Materials, Inc.) and Inabata & Co. |
| March | A large-area high-intensity flat-faced lamp is developed. | |
| ULVAC announces manufacturing equipment and evaluation equipment for visible light responsive photocatalytic functional films. | ||
| August | ULVAC celebrates its 50th anniversary. | |
| September | An industrial plant is established in Hachinohe for through processing of machining, surface finishing and washing of large components. | |
| December | The surface analysis instruments manufacturer, ULVAC-PHI, INC., will buy the surface analysis instruments department of its parent company to expand into the world market as a wholly owned subsidiary of ULVAC, Inc. | |
| 2003 | February | Releasing Low-k Film for Next-generation Semiconductors and Start of Taking Orders to Form the Low-k Film. |
| May | ULVAC's "ECO-SHOCK" has been selected as the winner of the Japan Industrial Journal President's Award of the Third JVIA(Japan Vacuum Industry Association) Award after being awarded the "Chairman's Award, Japan Machinery Federation's 23rd Award for Outstanding Environmental Machinery" in February 2003. | |
| Enhancement of the Production System for Large Substrate FPD Manufacturing Systems. | ||
| ULVAC has Begun to Accept Orders for Photo Mask Dry Etching Equipment for a 90 nm Technology Node. | ||
| July | ULVAC (SUZHOU) Co., Ltd. is established in China. | |
| August | Tokyo Office moves. | |
| 2004 | January | New building of Chigasaki Head Office is completed. |
| April | ULVAC, Inc. has joined the 1st Section of Tokyo Stock Exchange. | |
| Capital increase from JPY3.85 billion to JPY8.1 billion. | ||
| May | Capital increase from JPY8.1 billion to JPY8.95 billion. | |
| July | ULVAC Korea Precision is established to build a plant in Korea for the production of large-substrate TFT LCD production equipment. | |
| Pure Surface Technology is established in Korea to provide sureface treatment service. | ||
| August | ULVAC-TTI Technology(Shanghai)Corporation is established to sell and manufacture control systems in China, capitalized jointly by ULVAC and Reliance Electric Limited. | |
| December | Capital increase from JPY8,950,000,000 to JPY13,467,797,500. | |
| 2005 | January | ULVAC Vacuum Furnace (Shenyang) Co., Ltd. is established to manufacture industrial furnaces. |
| ULVAC acquires more than half of shares of Chengdu Orient Aifake Co., Ltd. by increasing its capital and renames it as ULVAC Orient (CHENGDU) Co., Ltd. | ||
| ULVAC Tianma Electric (Jing Jiang) Co.,Ltd. is established to product parts for vacuum pumnps. | ||
| March | A new plant for large vacuum pump production is added to ULVAC Seiki Co., Ltd. | |
| ULVAC acquires all the shares of Initium Inc. to expand biotechnology business. | ||
| April | VACCUM METALLURGICAL CO.,LTD merges with UMAT, Inc. and the name of the firm is changed to ULVAC Materials, Inc. (currently a consolidated subsidiary). | |
| Takes over the equipment and operations of Fujitsu VLSI Limited in order to expand its flat panel display operations. | ||
| Establishes OOO ULVAC with the objective of expanding the sales of products to Russia and providing customer support. | ||
| June | Expands the Hyeon-gok plant in order to increase production at ULVAC Korea, Ltd. | |
| Sets up the Reliability Evaluation Center at the Miyazaki Plant of ULVAC Kiko Inc. in order to evaluate and inspect small vacuum pumps. | ||
| November | Acquires the share of Litrex Corporation (50%) that was owned by Cambridge Display Technology Limited of the United Kingdom as a wholly-owned subsidiary. | |
| Establishes ULVAC(THAILAND)LTD. in order to market products in Thailand and provide customer support. | ||
| December | Establishes ULVAC Taiwan Manufacturing Corporation in order to manufacture flat panel display production equipment in Taiwan, and Ultra Clean Precision Technologies Corp. in order to provide customer support on such aspects as the machining and cleaning of parts. | |
| 2006 | March | Establishes ULVAC (China) Holding Co., Ltd. in China in order to oversee its subsidiaries there. |
| April | Establishes ULVAC AUTOMATION TAIWAN Inc. in order to manufacture control boards, etc. in Taiwan. | |
| July | Establishes ULVAC Research Center KOREA, Ltd. for research and development in South Korea | |
| Establishes ULVAC Research Center TAIWAN, Inc. for research and development in Taiwan. | ||
| Acquires the share (70%) of Sigma-Technos Co., LTD. that manufactures and sells precision stages. | ||
| August | Establishes ULVAC MALAYSIA SDN.BHD. for sales and field support in Malaysia. | |
| September | Establishes Chemical Center of ULVAC TECHNO, Ltd. for surface treatment of vacuum device parts in Chigasaki City, Kanagawa. | |
| Adds Miyazaki Plant to ULVAC KIKO, Inc. for intensive production of small vacuum pumps in Saito City, Miyazaki. | ||
| November | Establishes Aichi Plant for expansion of the production capacity for flat panel display manufacturing equipment in Kasugai City, Aichi. | |
| 2007 | February | ULVAC Materials, Inc. established the Chiba Tomisato Works. |
| June | Establishes India Branch of ULVAC, Inc. for expansion of business in India. | |
| October | Relocated its Mie Sales Office. | |
| Sigma-Technos Co., Ltd. started operation of its new factory and transferred its headquarters to the new company building. | ||
| 2008 | January | Consolidates the Electronics Equipment Division and the Advanced Equipment Division and establishes the “Advanced Electronics Equipment Division” to enhance the synergy effect. |
| October | Establishes Materials Business Group (Electronics Materials Division, Engineered Materials Division). | |
| December | Establishes of world’s first solar cell modules testing laboratory as an equipment manufacturer with the cooperation of TÜV Rheinland Japan Ltd. | |
| 2009 | January | ULVAC’s Turnkey Production Line of a-Si Thin film Solar Cell received a Nihon Keizai Shimbun Awards for Excellence in the 2008 Nikkei Superior Products and Services Awards. |
| February | Establishes the demonstration room for Film Thickness Measurement in the ULVAC Chigasaki Headquarter. | |
Establishes Engineering Service Site（ESS）, the demonstration room for Leak Detectors, in Japan(Chigasaki), Korea(Pyeongtaek), China(Shanghai), Taiwan(Hsinchu). |
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| March | The division name is changed from Flat Panel Display Equipment Division 1, 2, 3 to FPD・PV 1, 2, 3. | |
| July | Establishes PV (Photovoltaic) Division. The division name is changed from FPD・PV 1, 2, 3 to FPD Division. |
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| September | Participates in the CSR partner of local soccer team Shonan Bellmare. |
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